Büttgenbach, S.: search on Z-Library

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1

Investigation of Different Piezoresistive Materials to be Integrated into Micromechanical Force Sensors Based on SU 8 Photoresist

Oerke, Alexa, König, Christina, Büttgenbach, Stephanus, Dietzel, Andreas

Journal:

Key Engineering Materials

Year:

2014

Language:

english

File:

PDF, 789 KB

english, 2014

2

Fabrication of internally driven micro centrifugal force pumps based on synchronous micro motors

Andreas Waldschik, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 595 KB

english, 2010

3

Design and fabrication of resonating AT-quartz diaphragms as pressure transducers

H.-J. Wagner, W. Hartig, S. Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 441 KB

english, 1994

4

Optimization of lithographic masks using genetic algorithms

U. Triltsch, A. Phataralaoha, S. Büttgenbach, D. Straube, H. -J. Franke

Journal:

Analog Integrated Circuits and Signal Processing

Year:

2006

Language:

english

File:

PDF, 531 KB

english, 2006

5

RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper

Jan Dittmer, Lars Hecht, Rolf Judaschke, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 645 KB

english, 2010

6

Polymer microlenses with modified micromolding in capillaries (MIMIC) technology

Llobera, A., Wilke, R., Johnson, D.W., Buttgenbach, S.

Journal:

IEEE Photonics Technology Letters

Year:

2005

Language:

english

File:

PDF, 416 KB

english, 2005

7

Characterization of long-term stability of hydrophilized PEG-grafted PDMS within different media for biotechnological and pharmaceutical applications

Stefanie Demming, Claudia Lesche, Hannah Schmolke, Claus-Peter Klages, Stephanus Büttgenbach

Journal:

physica status solidi (a)

Year:

2011

Language:

english

File:

PDF, 526 KB

english, 2011

8

Electric quadrupole moments and isotope shifts of radioactive sodium isotopes

Touchard, F., Serre, J. M., Büttgenbach, S., Guimbal, P., Klapisch, R., de Saint Simon, M., Thibault, C., Duong, H. T., Juncar, P., Liberman, S., Pinard, J., Vialle, J. L.

Journal:

Physical Review C

Year:

1982

Language:

english

File:

PDF, 676 KB

english, 1982

9

Fabrication of microchannels by laser machining and anisotropic etching of silicon

M. Alavi, S. Büttgenbach, A. Schumacher, H.-J. Wagner

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 1.19 MB

english, 1992

10

Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps

A. T. Al-Halhouli, M. I. Kilani, A. Al-Salaymeh, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 387 KB

english, 2007

11

Monolithic miniaturized quartz microbalance array and its application to chemical sensor systems for liquids

Rabe, J., Buttgenbach, S., Schroder, J., Hauptmann, P.

Journal:

IEEE Sensors Journal

Year:

2003

Language:

english

File:

PDF, 1.03 MB

english, 2003

12

Micro gear pump with internal electromagnetic drive

Andreas Waldschik, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 654 KB

english, 2010

13

Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors

M. Feldmann, A. Waldschik, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 388 KB

english, 2007

14

Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties

Lei Xie, Monika Leester-Schädel, Gerhard Ziegmann, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 420 KB

english, 2010

15

Passive Micromixers with Interlocking Semi-Circle and Omega-Shaped Modules: Experiments and Simulations

Al-Halhouli, Ala’aldeen, Alshare, Aiman, Mohsen, Mukeet, Matar, Maher, Dietzel, Andreas, Büttgenbach, Stephanus

Journal:

Year:

2015

Language:

english

File:

PDF, 4.04 MB

english, 2015

16

Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing

Claudia Richter, Thomas Krah, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 587 KB

english, 2012

17

Closely coupled micro coils with integrated flux guidance: Fabrication technology and application to proximity and magnetoelastic force sensors

Seidemann, V., Buttgenbach, S.

Journal:

IEEE Sensors Journal

Year:

2003

Language:

english

File:

PDF, 1.70 MB

english, 2003

18

Micro molding for double-sided micro structuring of SU-8 resist

Oerke, A., Büttgenbach, S., Dietzel, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 501 KB

english, 2014

19

Simulation tool for proximity effects in high aspect ratio UV-lithographic patterning

U. Triltsch, M. Feldmann, C. Boese, S. Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.35 MB

english, 2008

20

Micro liquid dosing system

R. Roßberg, B. Schmidt, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

1995

Language:

english

File:

PDF, 802 KB

english, 1995

21

Modular software system for computer aided design of microsystems

D. Straube, U. Triltsch, H.-J. Franke, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 414 KB

english, 2006

22

In vitro and ex vivo toxicological testing of sildenafil-loaded solid lipid nanoparticles

Paranjpe, M., Neuhaus, V., Finke, J. H., Richter, C., Gothsch, T., Kwade, A., Büttgenbach, S., Braun, A., Müller-Goymann, C. C.

Journal:

Inhalation Toxicology

Year:

2013

Language:

english

File:

PDF, 1.50 MB

english, 2013

23

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Mixed system and component level T-CAD for micro fabrication

Hansen, U., Germer, C., Buttgenbach, S., Franke, H.J.

Year:

2003

Language:

english

File:

PDF, 580 KB

english, 2003

24

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Fabrication of double-sided micro structured mechanical sensors based on SU-8 resist using a new micro molding process

Oerke, A., Büttgenbach, S., Dietzel, A., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika

Year:

2013

Language:

english

File:

PDF, 726 KB

english, 2013

25

A sharp error estimate for the numerical solution of a Dirichlet problem for the Poisson equation

B. Büttgenbach, H. Esser, G. Lüttgens, R.J. Nessel

Journal:

Journal of Computational and Applied Mathematics

Year:

1992

Language:

english

File:

PDF, 443 KB

english, 1992

26

Triple-beam resonant silicon force sensor based on piezoelectric thin films

Th. Fabula, H.-J. Wagner, B. Schmidt, S. Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 963 KB

english, 1994

27

Easily manageable, electrothermally actuated silicon micro gripper

B. Hoxhold, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 804 KB

english, 2010

28

A novel reluctance actuator employing an embedded ferromagnetic foil

A. Waldschik, M. Feldmann, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 559 KB

english, 2007

29

Magnetic hyperfine anomalies

S. Büttgenbach

Journal:

Hyperfine Interactions

Year:

1984

Language:

english

File:

PDF, 2.40 MB

english, 1984

30

Integrated polymer optical accelerometer

A. Llobera, V. Seidemann, J.A. Plaza, V.J. Cadarso, S. Buttgenbach

Journal:

IEEE Photonics Technology Letters

Year:

2005

Language:

english

File:

PDF, 135 KB

english, 2005

31

High aspect ratio spiral and vertical meander micro coils for actuator applications

V. Seidemann, T. Kohlmeier, M. Föhse, H. H. Gatzen, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 418 KB

english, 2004

32

T-CAD for the analysis and verification of processing sequences

U. Hansen, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 340 KB

english, 2004

33

Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids

T. Beutel, M. Leester-Schädel, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 726 KB

english, 2012

34

Characterization of optical accelerometers based on UV-sensitive polymers

Llobera, A., Seidemann, V., Plaza, J.A., Cadarso, V.J., Buttgenbach, S.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 992 KB

english, 2006

35

Sensor guided handling and assembly of active micro-systems

S. Büttgenbach, J. Hesselbach, R. Tutsch, M. Berndt, B. Hoxhold, K. Schöttler

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 344 KB

english, 2006

36

Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures

Schrader, Christian, Herbst, Christian, Tutsch, Rainer, Büttgenbach, Stephanus, Krah, Thomas

Journal:

Key Engineering Materials

Year:

2010

Language:

english

File:

PDF, 406 KB

english, 2010

37

Fabrication of drive and guide components for micro motors

M. Feldmann, A. Waldschik, C. Ruffert, H. H. Gatzen, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 528 KB

english, 2008

38

Tribology of microsystems

R. Küster, R. Bandorf, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H. H. Gatzen, G. Bräuer

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 390 KB

english, 2006

39

Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing

Llobera, A., Cadarso, V.J., Zinoviev, K., Dominguez, C., Buttgenbach, S., Vila, J., Plaza, J.A., Biittgenbach, S.

Journal:

IEEE Photonics Technology Letters

Year:

2009

Language:

english

File:

PDF, 207 KB

english, 2009

40

Three-axes monolithic silicon low-g accelerometer

Butefisch, S., Schoft, A., Buttgenbach, S.

Journal:

Journal of Microelectromechanical Systems

Year:

2000

Language:

english

File:

PDF, 284 KB

english, 2000

41

Nanoindentation testing of SU-8 photoresist mechanical properties

A.T. Al-Halhouli, I. Kampen, T. Krah, S. Büttgenbach

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 182 KB

english, 2008

42

Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

Volker Seidemann, Sebastian Bütefisch, Stephanus Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 335 KB

english, 2002

43

Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist

Maren R. Kirchhoff, Jens Güttler, Andreas Waldschik, Marco Feldmann, Stephanus Büttgenbach

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 505 KB

english, 2008

44

Separate determination of liquid density and viscosity with sagittally corrugated Love-mode sensors

F. Herrmann, D. Hahn, S. Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 632 KB

english, 1999

45

Hyperfine structure and isotope shift of the D2 line of 118–145Cs and some of their isomers

C. Thibault, F. Touchard, S. Büttgenbach, R. Klapisch, M. De Saint Simon, H.T. Duong, P. Jacquinot, P. Juncar, S. Liberman, P. Pillet, J. Pinard, J.L. Vialle, A. Pesnelle, G. Huber

Journal:

Nuclear Physics A

Year:

1981

Language:

english

File:

PDF, 681 KB

english, 1981

46

Microcoils and microrelays — an optimized multilayer fabrication process

Markus Ohnmacht, Volker Seidemann, Stephanus Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.35 MB

english, 2000

47

Linear Variable Reluctance (VR) Micro Motors With Compensated Attraction Force: Concept, Simulation, Fabrication and Test

Feldmann, M., Buttgenbach, S.

Journal:

IEEE Transactions on Magnetics

Year:

2007

Language:

english

File:

PDF, 1.05 MB

english, 2007

48

SU-8 Optical Accelerometers

Llobera, Andreu, Seidemann, Volker, Plaza, Jos A., Cadarso, Vctor Javier, Buttgenbach, Stephanus

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 2.63 MB

english, 2007

49

[Technik im Fokus] Mikrosystemtechnik ||

Büttgenbach, Stephanus

Year:

2016

Language:

german

File:

PDF, 3.10 MB

german, 2016

50

Micromechanical force sensors based on SU-8 resist

A. Jordan, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 413 KB

english, 2012

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